Design And Analysis Of Vibrational Energy Harvesting Of Mems Device Based On Piezoelectric Thin Film Cantilevers

Design And Analysis Of  Vibrational Energy Harvesting Of  Mems Device Based On Piezoelectric Thin Film Cantilevers
Authors : Monika Sharma, Deepak Rohilla
Publication Date: 22-07-2013


Author(s):  Monika Sharma, Deepak Rohilla

Published in:   International Journal of Engineering Research & Technology

License:  This work is licensed under a Creative Commons Attribution 4.0 International License.

Website: www.ijert.org

Volume/Issue:   Vol.2 - Issue 7 (July - 2013)

e-ISSN:   2278-0181


In this paper a brief Introduction about MEMS and its components is providedNetworks of low power wireless devices are increasingly used in applications ranging from environmental to factory automation monitoring. Most of these devices must be operative 24hrs a day and may be in locations where manual battery replacement is difficult or costly. It would be desirable if there exists a miniaturized device that can convert ambient mechanical energies such as vibrations, which are readily available 24hrs a day, to power wireless devices. The concept of Energy Harvesting is introduced using PMPG circuitry Uimorphs of dimension 300mm40mm4mm has been modeled with 2mm thin film epitaxial layer of piezoelectric material. From the simulation results Gold is preferred over Aluminium ,Silicon ,Gallium Arsenide as about 1000Hz less frequency response is observed. A Unimorph with gold and PZT-5A material is considered the best model with resonance frequency of about 27120.92Hz with generated electric voltage of 2.00 volts whena load of 5 N/m2 is applied at the tip of unimorph. A PMPG has been designed using five unimorphs of dimensions 300404 m with one end of each is fixed and connected to a block of dimensions 403604 m. The base material of unimorph and fixed block of PMPG is of gold and piezoelectric layer of PZT 5A has been provided to each beam of microcantilvers. A force of 2 has been applied on the top of PMPG on z axis direction and eigen frequency 5N/m of 36085 Hz has been observed with a displacement of 5.453E-11 m and voltage generated across the PMPG is around 4.775volts. which is better than the base material Aluminium.


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